JPH01129253U - - Google Patents
Info
- Publication number
- JPH01129253U JPH01129253U JP2235988U JP2235988U JPH01129253U JP H01129253 U JPH01129253 U JP H01129253U JP 2235988 U JP2235988 U JP 2235988U JP 2235988 U JP2235988 U JP 2235988U JP H01129253 U JPH01129253 U JP H01129253U
- Authority
- JP
- Japan
- Prior art keywords
- electromagnetic coil
- coil
- deposited metal
- heating device
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004907 flux Effects 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 2
- 230000035699 permeability Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2235988U JPH01129253U (en]) | 1988-02-24 | 1988-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2235988U JPH01129253U (en]) | 1988-02-24 | 1988-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01129253U true JPH01129253U (en]) | 1989-09-04 |
Family
ID=31240404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2235988U Pending JPH01129253U (en]) | 1988-02-24 | 1988-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01129253U (en]) |
-
1988
- 1988-02-24 JP JP2235988U patent/JPH01129253U/ja active Pending
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